Perfluoroelastomers are a type of synthetic rubber having even greater heat and chemical resistance than the fluoroelastomers. Perfluoroelastomers are widely used as seals on semiconductor wafer processing equipment. This type of rubber can be used in extreme conditions up to temperatures around 300 degree celcius or even higher under special compounding. The basic disadvantages of this rubber are difficult processing, very high cost, poor physical properties at high temperature, and their high glass transition temperatures which limit their use at low temperatures. Most materials cannot be used below zero degree celsius, and even at normal temperatures their creep properties are likely to be poor.
The commercial application of perfluoroelastomer started in the 1960s. From this early beginning the use of perfluoroelastomers has increased steadily over the years. Today Perfluoroelastomer seals are manufactured by a number of companies worldwide.
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